论文部分内容阅读
用光激励氟气清洁外延硅表面＝ＳｕｒｆａｃｅｃｌｅａｎｉｎｇｆｏｒＳｉｅｐｉｔａｘｙｕｓｉｎｇｐｈｏｔｏｅｘｃｉｔｅｄｆｌｕｏｒｉｎｅｇａｓ［刊，英］／Ａｏｙａｍａ，Ｔ，…／／Ｊ．Ｅｌｅｃｔｒｏｃｈｅｍ．Ｓｏｃ，－１９９３，１４０（２）．－３６６～３７...
Excitation of fluorine gas with light to clean the surface of epitaxial silicon = SurfacecleaningforSiepitaxyusingphotoexcitedfluorinegas [/] / Aoyama, T, ... / / J. Electrochem. Soc, -1993,140 (2). -366 ~ 37 ...