论文部分内容阅读
采用微波等离子体化学气相沉积方法分别在CH4／H2，CO／H2和（CH4＋CO）／H2气体体系下合成了金刚石薄膜．结果表明，所合成的金刚石薄膜具有明显的柱状生长特性和较高的品质，（CH4＋CO）／H2体系合成的金刚石薄膜具有较高的生长速率和（100）晶面定向生长的特性．
Diamond films were synthesized by microwave plasma chemical vapor deposition in CH4 / H2, CO / H2 and (CH4 + CO) / H2 gas systems respectively. The results show that the synthesized diamond films have obvious columnar growth characteristics and high quality. The diamond films synthesized by (CH4 + CO) / H2 system have high growth rate and directional growth of (100) crystal plane.