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特点: 采用装有相位光栅(DIADUR式)的玻璃刻度尺。扫描信号质量极高,通过高倍率分割正弦波输出信号,可获得0.005μm=5nm这样极为精细的测量间距。
Features: A glass scale equipped with a phase grating (DIADUR). Scanning signal quality is very high, high-rate division of the sine wave output signal, can be 0.005μm = 5nm such a very fine measuring distance.