论文部分内容阅读
电容式薄膜真空计是近年来发展起来的一种性能良好的真空测量仪表。作者在文中介绍了他们研制的这种真空计的基本原理、结构形式、测量电路、实验结果及改进方向等。
Capacitive film vacuum gauge developed in recent years is a good performance of the vacuum gauge. The author introduced the basic principles, structure, measurement circuit, experimental results and improvement direction of the vacuum gauge they developed.