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随着MEMS的发展越来越多的微型零件被广泛用到各个机电系统领域中。微成形研究除了重视对于微零件成形工艺和材料的研究外,关于制造微零件所需的设备的研究也有了巨大的进展。文章总结了近年来微成形领域中微机加工模具的制造方法和先进技术,涵盖了传统加工和新型的LIGA技术的介绍,比较了各种方法的优缺点并且介绍了微成形模具的驱动设备,包括压电、超磁致伸缩马达和电磁驱动设备。
With the development of MEMS, more and more miniature parts are widely used in various fields of electromechanical systems. Micro-Forming Research In addition to focusing on micro-component forming processes and materials, research on the equipment needed to make micro-parts has also made tremendous progress. This paper summarizes the manufacturing methods and advanced technologies of micromachining die in the field of micromachining in recent years, covers the introduction of traditional processing and new LIGA technology, compares the advantages and disadvantages of various methods, and introduces the driving equipment of micromachining die, including Piezoelectric, giant magnetostrictive motor and electromagnetic drive equipment.