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一、前言椭圆偏振光法能测量固体表面层的厚度和折射率,在已有的各种测量膜厚方法中,椭圆偏振光法测量精度高,能测量最薄的膜厚。椭圆偏振光法作为研究固体表面的工具,它的应用很广,配合电化学测量可研究表面膜的生长和溶解过程,通过光学参数可对膜的组份和均匀性作出判断,因此除了用于膜层分析外,对于如金属腐蚀、氧化、吸附、催化等表面过程研究椭圆偏振光法也是一种有效的工具,所以,在电化学、金属、
I. Introduction Ellipsometry can measure the thickness and refractive index of a solid surface layer. Among various existing methods for measuring film thickness, the ellipsometry method has high measurement precision and can measure the thinnest film thickness. Elliptically polarized light as a tool for the study of solid surfaces, it is widely used, with electrochemical measurements can study the surface film growth and dissolution process, through the optical parameters of the composition and uniformity of the film to make judgments, so in addition to For the analysis of surface processes such as metal corrosion, oxidation, adsorption and catalysis, the ellipsometry is also an effective tool. Therefore, in the electrochemical, metal,