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(ZrO_2-TiO_2)是主要的氧化物膜料之一。在国内已逐渐推广使用。(ZrO_2-TiO_2)薄膜的折射率具有明显的不稳定性,其变化范围为2.07～2.24.出现负的和正的非均匀性。通过薄膜、膜料和残存膜料的成份分析证明:ZrO_2具有助氧作用;薄膜折射率与Ti.Zr比的线性关系以及熔坑中的Zr原子的分布。
(ZrO 2 -TiO 2) is one of the main oxide materials. In the country has gradually promote the use. The refractive index of (ZrO_2-TiO_2) thin films is obviously unstable, with a range of 2.07-2.24. Negative and positive non-uniformities appear. The analysis of the composition of the film, the film material and the remnant film material proves that: ZrO 2 has the function of supporting oxygen; the linear relationship between the film refractive index and the Ti.Zr ratio and the Zr atom distribution in the crater.