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The scanning proton microprobe has established itself as an essential tool for quantitative and trace elemental microscopical analysis and for nondestructive depth profiling, This paper discusses the major strengths and limitations of the instrument, the advances that have been made and the directions in which instrumental research is progressing to enable further improvements in probe performance. Recent applications in medical and in semi-conductor research are presented in order to illustrate the significance of these improvements.
The scanning proton microprobe has established itself as an essential tool for quantitative and trace elemental microscopical analysis and for nondestructive depth profiling, This paper discusses the major strengths and limitations of the instrument, the advances that have been made and the directions in which instrumental research is progressing to enable further improvements in probe performance. Recent applications in medical and in semi-conductor research are presented in order to illustrate the significance of these improvements.