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用射频溅射法已在兰宝石的(O001)和(0112)面上外延生长了ZnO单晶薄膜.研究了这些薄膜的晶体结构和电特性.对兰宝石(0112)面上沿ZnO薄膜C轴传播的SAW测量了包括相速度,耦合系数,传播损耗及延迟温度系数等声表面波(SAW)特性.通过中心频率为1050兆赫的滤波器证明了这种结构对于高频SAW器件的可用性.
ZnO single crystal films have been epitaxially grown on sapphire (O001) and (0112) surfaces by radio frequency sputtering.The crystal structures and electrical properties of these films have been investigated.The effects of ZnO thin films on the surface of sapphire (0112) The axis-propagating SAW measures surface acoustic wave (SAW) characteristics including phase velocity, coupling coefficient, propagation loss, and temperature coefficient of delay, and the usefulness of this structure for high frequency SAW devices is demonstrated by a filter centered at 1050 MHz.