讨论了二维光栅光调制器阵列的表面弯曲度对衍射光学特性的影响。利用实测的表面结构数据建立了阵列模型,利用Matlab软件计算了不同弯曲度对频谱面上衍射光强的分布影响,得到了弯曲度与对比度之间的关系。结果表明暗态时光栅面的弯曲度对成像对比度的影响很大,如果将光栅面的中心弯曲度控制在0.1λ以内,在像面上将获得1000以上的对比度。并通过实验动态显示器件的明暗态调制,得出减少光栅面弯曲度的优化方案。 The effect of the surface curvature of the two-dimensional grating light modulator array on the diffractive optical properties is discussed. The array model was established by using the measured surface structure data. The influence of different curvatures on the distribution of diffracted light intensity on the spectral plane was calculated by Matlab software, and the relationship between curvature and contrast was obtained. The results show that the curvature of the grating surface in the dark state greatly affects the imaging contrast. If the center curvature of the grating surface is controlled within 0.1λ, the contrast of more than 1000 on the image surface will be obtained. And through the experimental dynamic display of the device’s light and dark state modulation, resulting in reducing the curvature of the grating surface optimization program.