导出了工作于ＴＭ０１０模的圆柱形微波等离子体腔中等离子体与腔谐振频率关系的精确解析式和微扰近似公式，比较结果表明：在微波激励低气压气体激光器中微扰理论可相当精确地分析微波等离子体对腔的扰动效应。给出了消除等离子体与管壳的扰动引起的腔失谐的方法，从而在气体激光器中成功地形成了稳定与均匀的微波等离子体和稳定的激光输出。用微扰理论使此腔又具有测量等离子体电子密度和管壳微波介电常数的功能 The exact analytic and perturbation approximation formulas for the relationship between the plasma and the cavity resonance frequency in a cylindrical microwave plasma chamber operating in a TM010 mode are derived. The results show that the perturbation theory can be reasonably accurately analyzed in a microwave excited low-pressure gas laser Disturbance Effect of Microwave Plasma on Cavity. The method to eliminate the detuning of the cavity caused by the disturbance of the plasma and the shell is given. The stable and uniform microwave plasma and the stable laser output are successfully formed in the gas laser. Using perturbation theory, this cavity has the function of measuring the electron density of the plasma and the dielectric constant of the shell microwave