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从惯性约束核聚变(ICF)装置中具有重要作用的大口径激光传输反射镜出发,基于中国神光-Ⅲ主机装置的工程实践,分析了大口径激光传输反射镜夹持工艺的技术现状和难点,建立了大口径反射镜受夹持力变形的通用力学模型,提出了基于挠性零件的全新低应力夹持工艺,并利用有限元仿真和现场实验相结合的方法对挠性零件的力学特性进行了工艺效果验证。基于挠性零件的特点设计了新的全口径反射镜组件,对比研究了新旧工艺下夹持力对面形畸变(波前误差)的影响。最后,结合全新反射镜组件和夹持诱导畸变数值解耦方法构建了更加高效的完整装配工艺流程。该研究对解决大口径光学元件夹持诱导变形这一难题具有重要意义,有望为建设下一代ICF装置提供更加高效、可靠的技术方案。
Based on the engineering practice of China’s ShenGuang-Ⅲ host device, a large-caliber laser transmission mirror with an important role in the inertial confinement fusion nuclear fusion (ICF) device is introduced. The status quo and difficulties of the technology for holding the large-aperture laser transmission mirror are analyzed , A universal mechanical model of large-diameter mirror under the force of clamping force was established, a new low-stress clamping technology based on flexible parts was proposed, and the mechanical properties of the flexible parts were simulated by the combination of finite element simulation and field experiments Process effectiveness verification. Based on the characteristics of flexible parts, a new full aperture mirror assembly is designed and the influence of clamping force on the shape distortion (wavefront error) under the new and old processes is compared. Finally, a more efficient and complete assembly process is constructed by combining the new mirror assembly and the method of clamping-induced distortion numerical decoupling. The research is of great importance to solve the problem of large-diameter optical components clamping induced deformation and is expected to provide a more efficient and reliable technical solution for building the next generation of ICF devices.