A carburized layer with special physical and chemical properties was formed on the surface of commercial purity titanium by a double glow plasma hydrogen-free carburizing technique. High-purity netlike solid graphite was used as a raw material and commercial purity titanium was used as the substrate material. Argon gas was used as the working gas. The carburized layer can be obviously observed under a microscope. X-ray diffraction indicates that TiC phase with higher hardness and dissociate state carbon phase was formed in the carburized layer. The glow discharge spectrum (GDS) analysis shows that the carbon concentration distributes gradiently along the depth of carburized layer. The surface hardness of the substrate increases obviously. The hardness distributes gradiently from the surface to inner of carburized layer. The friction coefficient reduces by more than 1/2, the ratio wear rate decreases by above three orders of magnitude. The wear resistance of the substrate material is improved consumedly.