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以电浆电弧作为加热源来蒸发钨靶材,由气凝合成机制以及吹气装置制备W5O14纳米棒,并探讨了W5O14纳米棒的气体感测特性.实验过程中,使用氩气添加10%的氢气作为电浆气体,并在电流90A以及腔体压力53.3kPa下蒸发钨靶材.研究结果表明,在电浆气中加入10%氢气可成功地制备具有单晶结构的W5O14纳米棒,晶格间距为0.38nm,且W5O14纳米棒会沿着[010]方向成长,而W5O14纳米棒长宽比为12.7.透过参数作佳化的设计,发现W5O14纳米棒于48h,300℃下具有良好的热稳定性;气体感测研究结果表明,W5O14纳米棒在感测温度为200℃下对低浓度(1×10-6~4×10-6)的NO2气体具有良好的感测性质,随着气体浓度的增加其感测的灵敏度也会呈线性成长.
The plasma arc was used as the heating source to evaporate the tungsten target, and the W5O14 nanorods were prepared by the airgel condensation mechanism and the air blowing device. The gas sensing properties of the W5O14 nanorods were discussed. During the experiment, 10% Hydrogen was used as the plasma gas and the tungsten target was evaporated at a current of 90 A and a chamber pressure of 53.3 kPa.The results show that W5O14 nanorods with single crystal structure can be prepared successfully by adding 10% The spacing is 0.38nm, and the W5O14 nanorods grow along the [010] direction, while the W5O14 nanorods have an aspect ratio of 12.7. Through the optimization of the parameters, the W5O14 nanorods are found to have good The results of gas sensing study showed that W5O14 nanorods have good sensing properties for low concentration (1 × 10-6 ~ 4 × 10-6) NO2 gas at the sensing temperature of 200 ℃, The sensitivity of gas sensing increases linearly with increasing gas concentration.