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针对典型梳齿式静电微驱动器驱动稳定性差的问题,建立微驱动器驱动稳定性分析模型,系统分析微驱动器驱动稳定性随其各结构参数的变化关系,提出基于稳定性因子的微驱动器驱动稳定性评估方法。提出弹性支撑机构外置方案,建立弹性梁非线性特征模型,基于模型分析结果设计预弯弹性梁结构,建立基于梳齿结构参数的静电力模型,研究不同梳齿结构对驱动器驱动稳定性的影响。研究结果表明,弹性支撑机构外置、预弯弹性梁结构以及线性交叠梳齿结构能够有效提高梳齿微驱动器大位移输出的驱动稳定性。
Aiming at the poor driving stability of typical comb-type electrostatic microactuators, the driving stability analysis model of micro-drivers is established. The relationship between driving stability of micro-drivers and their structural parameters is systematically analyzed. The driving stability of micro-drivers based on stability factor assessment method. The external structure of the elastic support mechanism is proposed and the nonlinear characteristics model of the elastic beam is established. The pre-bending elastic beam structure is designed based on the model analysis results. The electrostatic force model based on the comb structure parameters is established to study the influence of different comb structure on the driving stability of the actuator . The results show that the external stability of the elastic support mechanism, the pre-bending elastic beam structure and the linear overlapping comb-tooth structure can effectively improve the driving stability of the large displacement output of the comb-tooth micro-driver.