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本文阐述了研制成功并投入使用的用于离子沟道效应、离子背散射研究装置,其包括能量狭缝、双向狭缝、高真气靶室和多维精密定角仪。多维精密定角仪是核心部分,其由微处理机实时控制四个高精度转轴,每个脉冲转动角小于0.005°,并有效地消除了空回,还有二个直线位移手动微调机构,可以同时使用数个晶体样品,带有终端限度和声光报警安全装置。 文中着重介绍了多维精密定角仪研制中的关键性问题和特殊性的几个问题。
In this paper, a device for ion channel and ion backscatter research, which has been successfully developed and put into use, is introduced. It includes energy slit, two-way slit, high-fidelity target chamber and multidimensional precision protractor. Multidimensional precision protractor is the core part of the real-time microprocessor control of four high-precision shaft, each pulse rotation angle of less than 0.005 ° and effectively eliminate the empty back, there are two linear displacement manual fine-tuning mechanism, you can Simultaneous use of several crystal samples, with terminal limits and sound and light alarm safety devices. The paper mainly introduces some key problems and special problems in the development of multidimensional precision pyrometer.