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在工业应用中,要求具有小型和稳定的压力传感器。我们利用普通的平面集成电路技术开发了一个新的传感器。为了避免长漂,依赖于压力灵敏度的温度补偿是由enbedded稳压电源而不是由传统的电阻网络。输入压力范围是0—0.1MPa。灵敏度变化为200ppm/℃或更好,非线性误差(包括滞后)为满刻度的0.05％。传感器可以安装在印刷电路板上。
In industrial applications, small and stable pressure sensors are required. We developed a new sensor using common planar integrated circuit technology. To avoid long drift, temperature compensation that relies on pressure sensitivity is powered by an enbedded regulated power supply rather than by a conventional resistor network. The input pressure range is 0-0.1MPa. Sensitivity changes to 200ppm / ° C or better, non-linearity errors (including hysteresis) to 0.05% of full scale. The sensor can be mounted on a printed circuit board.