论文部分内容阅读
基于氦质谱检漏仪的结构和原理,设计了适用于电真空器件气密性检测的检漏平台。电真空器件的结构特点及测量精度要求决定了氦罩法和喷吹法是电真空器件氦质谱检漏技术中最常用方法,氦罩法测定总漏率,总漏率超出允许值后用喷吹法对漏孔准确定位。双回路复杂结构和复杂串联漏孔的定位,表明了氦质谱喷吹法在电真空器件检漏中的影响因素必须遵循的喷吹检漏原则。同时,温度、临时密封材料和设备材料吸附等因素会带来一定的测量误差。
Based on the structure and principle of the helium mass spectrometer leak detector, a leak detection platform suitable for air tightness testing of electric vacuum devices was designed. The structural characteristics and measurement accuracy of the electric vacuum device determine that the helium hood method and the injection method are the most common methods for helium mass spectrometry leak detection in the electric vacuum device. The helium mask method determines the total leak rate and the total leak rate exceeds the allowable value, Blown method of leakage hole accurate positioning. The dual-loop complex structure and the location of complicated tandem leaks show the principle of leak detection that must be followed when the helium mass spectrometry is applied to the leak detection of electrical vacuum devices. At the same time, temperature, temporary sealing material and equipment material adsorption and other factors will bring some measurement error.