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六、温度补偿固态压力传感器受温度影响较大,这是人所共知的,因此除了在制作工艺上采取必要的措施以外,对传感器进行外电路补偿是必不可少的。这里采用的是一种常规的方法,其原理如图6所示。图6中,R_1、R_2、R_3、R_4为应变电阻;R_TZ为零点温度补偿电阻;R_Z为零点配平电阻;R_TS为灵敏度温度补偿电阻;V为桥电压;V_p为输出。 1.零点的温度补偿传感器零点随温度变化主要是由应变电阻的不一致性和应变电阻温度系数的不一致性引起的。因此对其补偿是通过改变一个桥臂的电阻值及其温度系数来实现的。如果温度变化了△T,电桥零点输出有了△V_po的变化,此时,零点温度系数为
Sixth, the temperature compensation Solid-state pressure sensor affected by the temperature is larger, it is well known, so in addition to the production process to take the necessary measures, the external circuit sensor compensation is essential. Here is a conventional method, the principle shown in Figure 6. In Figure 6, R_1, R_2, R_3, R_4 for the strain resistance; R_TZ zero temperature compensation resistor; R_Z zero trim resistor; R_TS sensitivity temperature compensation resistor; V bridge voltage; V_p for the output. 1. zero temperature compensation Sensor zero temperature changes with the main strain caused by the inconsistency and strain resistance temperature coefficient of inconsistency caused. So its compensation is achieved by changing the resistance of a bridge arm and its temperature coefficient. If the temperature changes △ T, bridge zero output with △ V_po changes, this time, the zero temperature coefficient