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本文根据化学热力学平衡理论,建立了完整的计算方法,对MOCVD TMG-AsH_3-H_2和TMG-AsH_3-He体系的均相与异相化学反应平衡条件下42个气相杨种的分压随温度和V/Ⅲ比的变化进行了细致的计算和比较,分析了生长参数所引起的气相分压的改变对系统的质量输运、掺杂特性及材料质量的影响。
In this paper, based on the theory of chemical thermodynamics equilibrium, a complete calculation method is established. The partial pressure of 42 gas phase poplar species under the equilibrium condition of homogeneous and heterogeneous chemical reaction of MOCVD TMG-AsH 3-H 2 and TMG-AsH 3 -He system is proportional to temperature and V / III ratio changes were carefully calculated and compared to analyze the growth parameters caused by changes in the gas phase pressure on the system of mass transport, doping characteristics and material quality.