对电子探针试样进行表面喷碳,其厚度一般掌握在200—250A左右,此处还应使标样和未知样取得尽量一致的膜厚(质量厚度)。目前多数实验室采用白瓷片等作模拟样品,蒸镀中凭肉眼的观察比色来掌握控制膜厚。也有少数实验室采用了一些别的方法,如加拿大Alberta大学以干净玻璃片作作模拟样品,通过监测其表面碳膜电阻的变化来掌握控制膜厚。笔者移植了后一方法,异设计出一个简单的控制电路(图1),在本实验室的DV—502高真空蒸镀仪(美)上实现了喷碳过程的自动控制,经一年多的使用,效果满意。电路中Rm即模拟样品,是将一块 Electron probe samples were sprayed on the surface of the carbon, the thickness is generally controlled at about 200-250A, where the standard sample and unknown samples should be made as thick as possible thickness (mass thickness). At present, most laboratories use white porcelain as a simulation sample and control the thickness of the film by observing the colorimetric with the naked eye. There are also a few other laboratories to use a number of other methods, such as Canada’s University of Alberta to clean glass as a sample, by monitoring the surface of the carbon film resistance to control the thickness of the film. I transplanted the latter method, different design a simple control circuit (Figure 1), in our laboratory DV-502 high vacuum deposition instrument (the United States) to achieve automatic control of carbon injection process, after more than a year The use of satisfactory results. Circuit Rm is the analog sample, is a piece