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采用热键合技术制备了Yb:Y_3Al_5O_(12)/Y_3Al_5O_(12)(Yb:YAG/YAG)复合晶体,对复合晶体进行了结构表征和键合质量检测.利用光学显微镜和扫描电镜观察了复合晶体横截面的形貌;在偏光显微镜下观察键合区域的应力,利用干涉条纹来表征复合晶体的光学均匀性;通过红外透过光谱的测量来检测复合晶体的键合质量.实验结果表明:热键合技术制备的Yb:YAG/YAG复合晶体键合界面处无界面缺陷,不存在复合界面空间过渡层,光学均匀性良好.
The Yb: Y_3Al_5O_ (12) / Y_3Al_5O_ (12) (Yb: YAG / YAG) composite crystal was prepared by thermal bonding technique, and the crystal structure and bonding quality of Yb: Y_3Al_5O_12 / Y_3Al_5O_12 / YAG composite were characterized by optical microscopy and scanning electron microscopy. The cross-section morphology of the crystal was observed, the stress of the bonding region was observed under a polarizing microscope, the optical uniformity of the composite crystal was characterized by the interference fringes, and the bonding quality of the composite crystal was measured by infrared transmission spectroscopy.The experimental results show that: The Yb: YAG / YAG composite crystal prepared by the thermal bonding technique has no interface defects at the bonded interface, does not have a transition layer at the composite interface, and has good optical uniformity.