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强脉冲离子束作为一种闪光热源在材料表面改性方面具有广泛的应用.烧蚀效应对于强脉冲离子束与物质相互作用以及强脉冲离子束薄膜沉积过程具有重要的影响.因此,分析强脉冲离子束的烧蚀过程和机理对于优化其应用具有重要意义.为了研究强脉冲离子束的烧蚀产物特性,采用1.2—1.5 J/cm~2的强脉冲离子束辐照纯锌靶材,并使用单晶硅片收集辐照过程中产生的烧蚀产物.通过扫描电子显微镜、能谱仪和高精度天平的分析与测量,得到了烧蚀产物的表面形貌和相关特性等实验结果.结合实验和有限元模拟计算得到的材料表面温度场分布演化结果,可以证明在强脉冲离子束辐照锌靶材的烧蚀过程中会有气态、液态和固态三种不同状态的烧蚀产物产生.
As a flash heat source, the intense pulsed ion beam has a wide range of applications in surface modification of materials.The ablation effect has an important influence on the interaction of intense pulsed ion beam with matter and the deposition of intense pulsed ion beam thin films.Therefore, The ablation process and mechanism of ion beam are of great significance for optimizing its application.In order to study the ablation product characteristics of intense pulsed ion beam, a pure pulsed ion beam of 1.2-1.5 J / cm ~ 2 was used to irradiate pure zinc target Ablation products produced during the irradiation were collected using a single crystal silicon wafer.The experimental results of the surface morphology and related properties of the ablated products were obtained through the analysis and measurement of scanning electron microscopy, energy dispersive spectrometer and high precision balance. The evolution of the temperature field distribution on the surface of the material calculated by the experiments and finite element simulation can prove that there are three kinds of ablation products in gaseous, liquid and solid state during the ablation process of the intense pulsed ion beam zinc target.