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绒面ZAO(ZnO∶Al,氧化锌铝)透明导电膜在硅基薄膜太阳能电池领域应用前景广阔,本文利用直流磁控溅射方法,采用氧化锌铝陶瓷靶材制备了ZAO透明导电膜,并用自制的腐蚀液对膜层进行腐蚀以便形成太阳能电池所需要的表面凹凸起伏的绒面结构。研究了不同镀膜温度对膜层性能的影响,不同退火条件下膜层热稳定性的变化情况,不同腐蚀时间下膜层电阻、透过率以及表面形貌的变化,结果表明,在相同真空度、溅射功率和节拍的情况下,220℃下制备的ZAO透明导电膜膜层性能最好,腐蚀时间为30 s时获得的绒面效果好。
ZAO (ZnO: Al, zinc aluminum oxide) transparent conductive film has broad application prospects in the field of silicon-based thin-film solar cells. In this paper, a ZAO transparent conductive film was prepared by DC magnetron sputtering with ZAO Self-made etching solution to the film etching in order to form the solar cell surface roughness required suede structure. The effects of different coating temperature on the properties of the coatings, the changes of the thermal stability of the coatings under different annealing conditions, the changes of the resistance, the transmittance and the surface morphology of the coatings under different etching times were investigated. , The sputtering power and the beat, the ZAO transparent conductive film prepared at 220 ℃ has the best performance, and the etching effect is good when the etching time is 30 s.