据报道,美国滨州大学光电材料中心(EOC)的研究人员已成功制造出可生产纯炭半导体元件的4英寸(100nm)石墨炭(graphene)晶圆片。4英寸石墨烯晶圆可包含约75000个元件以及测试结构。研究人员指出,他们开发的制程能生产出速度比硅晶圆片快100~1000倍的石墨烯晶圆片,此外,也能用于制 It has been reported that researchers at Binzhou University’s Center for Optoelectronic Materials (EOC) have successfully fabricated 4-inch (100-nm) graphene wafers that produce pure carbon semiconductor components. A 4 inch graphene wafer can contain about 75,000 elements and a test structure. Researchers pointed out that the process they developed could produce graphene wafers 100 to 1,000 times faster than silicon wafers, and could also be used to make