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用ＲＦ磁控放电方法以纯金属钛做靶材在氩氧混合气体中制备了ＴｉＯ２薄膜，Ｒａｍａｎ光谱测量表明，在２Ｐａ工作气压下制备的ＴｉＯ２薄膜为锐钛矿结构，而在０２Ｐａ工作气压下制备的是金红石结构。工作气压的改变引起了ＴｉＯ２薄膜沉积中的相转变。
Using RF magnetron discharge method to make pure titanium metal target in a mixed gas of argon and oxygen prepared TiO2 film, Raman spectroscopy measurements showed that the working pressure of 2Pa TiO2 film prepared anatase structure, and at 0 2Pa working pressure The rutile structure was prepared. The change of operating pressure causes the phase transition in the deposition of TiO2 thin films.