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采用全陶瓷规管进行电荷屏蔽,实现了对薄膜真空计的改进,以满足在含有大量带电离子及饱和水蒸汽等特殊真空环境中低真空度的快速准确测量。介绍了提高传感精度且降低温度及水蒸气对电容薄膜真空计影响的方法、器件选择以及单片机控制系统等,并给出了部分测试结果。本文设计的低真空度测量系统具有模块化、精度高、响应速度快等优点,为国内特殊真空环境下低真空度测量系统提供了设计参考。
The use of all ceramic regulators for charge shielding provides an improvement over thin-film vacuum gauges to meet the fast and accurate measurement of low vacuum in special vacuum environments with large amounts of charged ions and saturated water vapor. The methods to improve the sensing accuracy, reduce the influence of temperature and water vapor on the capacitance film vacuum gauge, the device selection and the control system of the single chip are introduced. Some test results are also given. The low vacuum measurement system designed in this paper has the advantages of modularization, high precision and fast response. It provides a reference for the design of low vacuum measurement system in special vacuum environment.