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制备了Nd28Fe66B6/Fe50Co50多层纳米复合磁性薄膜,对溅射态和650℃退火处理15min试样的相成分分析和微结构的观察显示,溅射态薄膜呈非晶态,经650℃退火处理15min后,薄膜主要相成分为硬磁性Nd2Fe14B相和软磁性相FeCo(110)相.Nd2Fe14B相呈柱状,其易磁化c轴垂直于膜面,尺寸约10nm.在硬磁性相和软磁性相之间存在少量富Nd相和非晶态,富Nd相大小约7nm.磁性测量和分析表明,1)该系列薄膜退火态具有垂直于膜面的磁晶各向异性.2)对于固定厚度(10nm)层Nd-Fe-B和不同厚度(tFeCo=1—100nm)层FeCo多层纳米复合膜,剩磁随软磁相FeCo厚度的增加快速增加,而矫顽力则减小.当tFeCo=5nm时,最大磁能积达到200kJ/m3.3)硬磁相Nd-Fe-B层和软磁相FeCo层之间交换耦合导致剩磁和磁能积增强.
The Nd28Fe66B6 / Fe50Co50 multilayer nanocomposite magnetic thin films were prepared. The phase composition analysis and microstructure observation of the sputtered and annealed 15min specimens at 650 ℃ showed that the as-sputtered films were amorphous and annealed at 650 ℃ for 15min , The main phase composition of the film is hard magnetic Nd2Fe14B phase and soft magnetic phase FeCo (110) phase.Nd2Fe14B phase columnar, easy magnetization c axis perpendicular to the membrane surface, the size of about 10nm between the hard magnetic phase and the soft magnetic phase There is a small amount of Nd-rich phase and amorphous, Nd-rich phase size of about 7nm.Magnetic measurement and analysis show that 1) the series of thin films annealed with perpendicular to the film surface magnetocrystalline anisotropy.2) For a fixed thickness (10nm) Layer of Nd-Fe-B and different thickness (tFeCo = 1-100nm) FeCo multilayer nanocomposite films, the remanence increases rapidly with the increase of FeCo thickness of the soft magnetic phase, while the coercivity decreases.When tFeCo = 5nm , The maximum energy product reaches 200 kJ / m3.3) The exchange coupling between the hard magnetic phase Nd-Fe-B layer and the soft magnetic phase FeCo layer leads to the enhancement of remanence and magnetic energy products.