论文部分内容阅读
本文报道了用TiO_2/SnO_2陶瓷制成的实芯园盘湿敏元件的阻值稳定性与水吸附性质的关系的研究。研究了由于水的化学吸附形成的羟基团使湿敏的阻值增加与陶瓷微观结构间的相互关系;陶瓷的微观结构是通过分析扫描电镜,粉末法X射线衍射的数据和通过在充满水气的真空中使湿敏阻值变化的试验的方法得到的。此外,还让湿敏元件在大气中,外加100Hz交流脉冲的情况下,进行了3000小时的寿命试验。最后,通过介绍陶瓷湿敏元件的简化等效电路的方法,讨论了未加热的湿敏元件实际应用的可能性。
In this paper, the relationship between the resistance stability and the water adsorption properties of solid core disk moisture sensors made of TiO 2 / SnO 2 ceramics was reported. The relationship between the increase of the humidity resistance and the ceramic microstructure was investigated by the hydroxyl groups formed by the chemisorption of water. The microstructure of the ceramic was analyzed by scanning electron microscopy (SEM), powder X-ray diffraction (XRD) Of the vacuum humidity sensitive resistance test method obtained. In addition, the humidity sensor was also allowed to undergo a 3000-hour life test in the atmosphere with 100 Hz AC pulse applied thereto. Finally, by introducing the simplified equivalent circuit of the ceramic humidity sensor, the possibility of practical application of the unheated humidity sensor is discussed.