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针对RF MEMS开关释放时间过长的问题,提出了在开关梁上设计一个上悬梁的方法,以增大开关梁所受压膜阻尼,抑制开关梁在平衡位置附近的振动,从而缩短RF MEMS开关的释放时间。给出了这种方法的相关理论、等效模型及仿真结果。通过ANSYS仿真雷声梁在设置上悬梁前后的动态特性:对于4μm高的梁,释放时间由设置上悬梁前的103μs(0.5μm厚),176μs(0.8μm厚)和232.5μs(1.1μm厚)分别下降为53.3,89和123.4μs;对于3μm高0.5μm厚的梁,释放时间由43.3μs下降为22μs。仿真结果均表明:在标准大气压下,当雷声梁高度为上悬梁高度的一半时,加入上悬梁后雷声梁的释放时间约为原来的1/2,即开关速度约为原来的2倍。
Aiming at the problem that the release time of the RF MEMS switch is too long, a method of designing a cantilever beam on the switch beam is proposed to increase the damping of the membrane on the switch beam, suppress the vibration of the switch beam near the equilibrium position, and shorten the RF MEMS switch Release time. Relevant theories, equivalent models and simulation results of this method are given. The dynamic characteristics of the thunder beam before and after setting up the cantilever were simulated by ANSYS. For the 4μm high beam, the release time was determined by 103μs (0.5μm thick), 176μs (0.8μm thick) and 232.5μs (1.1μm thick) Decreased to 53.3, 89 and 123.4μs respectively; for the 3μm and 0.5μm thick beams, the release time decreased from 43.3μs to 22μs. The simulation results show that under the normal atmospheric pressure, when the height of the thunder beam is half of the height of the cantilever beam, the release time of the thunder beam after adding the cantilever beam is about 1/2, that is, the switching speed is about twice that of the original .