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本文评述并探讨了α-Si:H薄膜在电子学领域的种种应用。α-Si:H太阳电池是非晶硅薄膜的最重要的器件,目前的主要研究课题仍是改进材料性质和器件参数,以提高电池的能量转换效率。利用α-Si:H灵敏的光敏效应记录图象信息,可能有广阔的应用前景(如用于摄象管和静电复印等)。以α-Si:H场效应管为基础的集成电路,易于实现大面积和结构的立体化,因此有很大吸引力。α-Si:H FET驱动的液晶大面积显示和材料本身的场致发光在大面积平面显示中直接应用的可能性亦引人注目。以整流、检测等为目的的其它α-Si:H二极管也都具有相当的价值。
This article reviews and discusses the various applications of α-Si: H thin films in electronics. α-Si: H solar cells are the most important devices for amorphous silicon thin films. At present, the main research topic is to improve the material properties and device parameters so as to improve the energy conversion efficiency of the battery. The use of a-Si: H sensitive photographic effect to record image information may have broad application prospects (eg for tube and xerography, etc.). The integrated circuit based on the α-Si: H FET is easy to realize the large-scale and structural three-dimensional, so it is very attractive. The possibility of direct display of a-Si: H FET-driven large-area display of liquid crystal and electroluminescence of the material itself in a large-area flat panel display is also noticeable. Other α-Si: H diodes for rectification, detection, etc., are also of considerable value.