论文部分内容阅读
采用直流磁控溅射的方法制备了一系列(CoPt/Ag)n多层膜,然后在不同温度下进行了退火处理,并对其结构和磁性做了初步的表征,研究了Ag的含量以及薄膜中每一单元厚度与总厚度对退火后薄膜的结构以及磁性能的影响.结果表明,膜厚较薄时(大约20nm)有利于薄膜沿(001)取向生长,Ag的加入不但能够抑制CoPt晶粒的过分长大还可以诱导薄膜的(001)取向,使退火后的薄膜在垂直于膜面方向上的矫顽力大大增强.对于特定组分为Co40Pt43Ag17的薄膜,经600℃退火后已经显示了明显的(001)取向,垂直于膜面方向上的矫顽力为5.6×105A/m,饱和磁化强度为0.65T,并且磁滞回线具有很好的矩形度,剩磁比(s)为0.95.
A series of (CoPt / Ag) n multilayers were prepared by direct current magnetron sputtering and then annealed at different temperatures. The structure and magnetic properties of CoPt / Ag multilayers were characterized preliminarily. The content of Ag and The results show that the film grows along the (001) orientation when the film thickness is thin (about 20 nm). The addition of Ag can not only suppress the CoPt The overgrowth of the grains can also induce the (001) orientation of the film, resulting in a greatly enhanced coercivity of the annealed film in a direction perpendicular to the film surface. For films with a specific composition of Co40Pt43Ag17, after annealing at 600 ° C, (001) orientation, the coercivity perpendicular to the film surface is 5.6 × 105A / m, the saturation magnetization is 0.65T, and the hysteresis loop has a good squareness. The remanence ratio (s ) Is 0.95.