高纯三氟化氮气体在电子工业中有着广阔的应用前景,在生产过程中常存在微粒子的污染问题,本文介绍了目前工业化生产三氟化氮(NF3)过程中微粒子产生的原因及几种不锈钢管路和阀门、附件的处理方法。 High-purity nitrogen trifluoride gas has broad application prospects in the electronics industry. In the production process, there is often the problem of particle pollution. This paper introduces the reasons for the production of fine particles in the industrial production of nitrogen trifluoride (NF3) and several kinds of stainless steel Pipelines and valves, accessories approach.