论文部分内容阅读
为适应三维光学微细加工及三维光学信息存储研究的需要,研制了共聚焦激光扫描荧光显微镜的工作台式扫描系统,扫描范围138μm×138μm。工作台采用压电陶瓷驱动器(PZTactuator)驱动的方式来获得高分辨率的位移,采用带柔性铰链的杠杆放大装置来获得较大的位移范围。描述了工作台的工作原理,并对其静态和动态性能进行了测试,实验表明这一扫描系统能很好的应用于共聚焦激光扫描荧光显微镜系统。
In order to meet the need of three-dimensional optical microfabrication and three-dimensional optical information storage, a scanning system of confocal laser scanning fluorescence microscope was developed. The scanning range was 138μm × 138μm. The workbench is driven by a PZTactuator to achieve high-resolution displacement. A lever-operated magnification with a flexible hinge is used to achieve a large displacement range. The working principle of the workbench is described and the static and dynamic performance of the workbench is tested. Experiments show that this scanning system can be well applied to the confocal laser scanning fluorescence microscope system.