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设计并搭建了一套反射镜损耗增量的实时测量系统,实验得到反射镜损耗变化曲线。结果表明,该系统能有效地监测反射镜损耗在等离子体环境中变化的过程,并揭示损耗变化规律,并发现实际损耗增量和与等离子体作用后的自然放置时间密切相关;改变放电电流和腔体气压,损耗增量幅度明显不同。测量结果为等离子体作用下反射镜损耗变化机理的研究提供了实验依据。
A set of real-time measurement system of mirror loss increment is designed and constructed. The curve of mirror loss is obtained experimentally. The results show that the system can effectively monitor the change of the mirror loss in the plasma environment and reveal the variation law of the loss, and find that the actual loss increment is closely related to the natural placement time after the plasma action; and the change of the discharge current and Cavity pressure, loss increments significantly different. The measurement results provide the experimental basis for the research on the mechanism of the change of mirror loss under the action of plasma.