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为了解决微深孔的精密测量问题,介绍了一种基于双光纤耦合原理的微深孔测量方法。该方法属于瞄准触发式测量方法,通过双光纤耦合器及显微物镜将光纤传感器触测头在微深孔内的微小位移量转变为CCD图像捕捉系统的横向位移量,利用图像空间定位算法得到CCD上的光斑中心位置。由CCD上光斑能量中心位置与传感器触测点在空间位置的一一对应关系即可得出传感器触测头在孔内部与孔壁的接触状况,从而实现对被测孔测量时的高精度瞄准。光纤传感器瞄准后将发出信号给测量长装置,如双频激光干涉仪,以实现对微深孔的精密测量。最后运用该方法对直径为0.2mm、深2.0mm深盲孔的直径进行了测量,其测量结果的重复不确定度优于0.4μm。同时运用该方法对直径为0.3mm、深1.0mm的微深孔的圆柱度进行了测量。
In order to solve the problem of micro-deep hole measurement, a micro-deep hole measurement method based on the principle of dual fiber coupling is introduced. The method belongs to aiming and triggering measurement method, and the tiny displacement of the probe of the optical fiber sensor touches into the horizontal displacement of the CCD image capturing system through the double optical fiber coupler and the micro objective lens. The image space location algorithm is used to obtain CCD spot position on the center. The contact state of the touch probe of the sensor with the hole wall can be obtained from the one-to-one correspondence between the position of the energy center of the spot on the CCD and the touch point of the sensor in the spatial position, so as to realize high-precision aiming of the measured hole . Aiming at optical fiber sensors will send a signal to the measuring device, such as dual-frequency laser interferometer, in order to achieve the micro-deep hole precision measurement. Finally, the diameter of the blind hole with the diameter of 0.2mm and the depth of 2.0mm was measured by this method. The repeated uncertainty of the measurement results was better than 0.4μm. At the same time, the method was used to measure the cylindricity of micro-deep holes with diameter of 0.3mm and depth of 1.0mm.