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研制了一种蓝宝石抛光用固着磨具,以硬度低于蓝宝石的铈基稀土和氧化镁为磨粒,基于化学热力学,藉由HSC Chemistry软件,进行混合磨粒在湿式环境下,与蓝宝石发生反应的吉布斯自由能计算和平衡成分分析。结果表明,各成分间有生成固溶体、水合物和化合物的趋势。发生反应后,再由磨粒的机械摩擦作用去除表面生成物,即可实现抛光。压强为0.02 MPa,主轴转速100 r/min时,1 h后,蓝宝石晶片中间和边缘的平均粗糙度,分别改善了Ra71 nm和Ra90nm。加工实验证明该混合软质磨粒固着磨具是一种很有潜力的蓝宝石表面质量改善工具。
A sapphire grinding fixture was developed that uses samarium-based cerium-based rare earths and magnesium oxide as abrasive grains based on chemical thermodynamics and HSC Chemistry software to perform a mixed abrasive reaction with sapphire in a wet environment Gibbs free energy calculation and equilibrium composition analysis. The results show that there is a tendency for the solid components, hydrates and compounds to form between the components. After the reaction, and then by the abrasive particles of the mechanical friction to remove the surface product, you can achieve polishing. When the pressure is 0.02 MPa and the spindle speed is 100 r / min, the average roughness of the middle and edge of the sapphire wafer is improved by Ra71 nm and Ra90 nm respectively after 1 h. Processing experiments show that the mixed soft abrasive fixed abrasive is a potential sapphire surface quality improvement tools.