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本文简要介绍了灵敏面直径分别为20,12mm,中心孔为4mm的环形探测器的制造工艺和基本性能。并给出了扫描电子显微镜和扫描电子束爆光机中,采用环形探测器检测背散射电子的实验数据、曲线及扫描图象。
This article briefly introduces the manufacturing process and basic performance of a ring-shaped detector with sensitive surface diameters of 20, 12 mm and center hole of 4 mm. And the experimental data, curves and scanning images of the backscattered electrons detected by the ring detector in scanning electron microscope and scanning electron beam lithography machine are given.