The Cu-containing steels are widely used for nuclear pressure vessel materials because of their good performance under high pressure and high temperature. In this article, magnetron sputtering was used to prepare iron films with various Cu contents. The samples were annealed at temperature range of 300–500 °C, and the structural,mechanical, and magnetic properties were studied. The results show that both hardness and modulus change along with copper content and annealing temperature. The change in coercivity after annealing is similar to that of hardness. The crystal grain growth in matrix ferrum and Cu precipitation during annealing influences both the mechanical and magnetic properties. The Cu-containing steels are widely used for nuclear pressure vessel materials because of their good performance under high pressure and high temperature. In this article, magnetron sputtering was used to prepare iron films with various Cu contents. The samples were annealed at temperature range of 300-500 ° C, and the structural, mechanical, and magnetic properties were studied. The results show that both both hardness and modulus change along with copper content and annealing temperature. The change in coercivity after annealing is similar to that of hardness. The crystal grain growth in matrix ferrum and Cu precipitation during annealing influences both mechanical and magnetic properties.