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采用溶胶-凝胶法制备Al_2O_3感湿薄膜,并通过大量实验,研究了溶胶的配制、涂覆层数及热处理工艺,对其感湿特性也进行了测试.
Al 2 O 3 wet films were prepared by sol-gel method. Through a large number of experiments, the preparation of sol, coating layers and heat treatment process were also studied.