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本文介绍在日立X—650扫描电子显微分析仪上对X光光谱仪探测效率T的测定工作。利用探测效率作定量成份分析不仅可以减少测试工作量,而且可以解决某些难以制备的纯元素标样问题。并可逐步过渡到和X光能谱仪连机使用。一、探测效率T的曲线和回归方程根据Russ用以计算纯元素标积X光强度因子P的公式,探测效率T为: T=P·A/F·R·Q·WL 将X光光谱仪实测到的特征X光强度作为P,代入上式,即可得这条谱线的探测效率。式中的各参量计算式
This article describes the Hitachi X-650 Scanning Electron Microscope on the X-ray spectrometer detection efficiency T determination. The use of detection efficiency as a quantitative component analysis can not only reduce the test workload, but also can solve some difficult to prepare the pure element standard. And can be gradually transitioned to X-ray spectrometer connected to use. First, the detection efficiency curve and regression equation T According to Russ used to calculate the pure elements of the product of the X-ray intensity factor P formula, detection efficiency T: T = P · A / F · R · Q · WL measured by the X-ray spectrometer To the characteristics of X-ray intensity as P, into the above formula, you can get this spectral detection efficiency. In the formula of each parameter