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本文讨论了ULSI的发展对低介电常数 (low k)介质的需求 ,介绍了几种有实用价值的low k介质的研究和发展现况 ,最后评述了low k介质在ULSI中应用的前景
This paper discusses the development of ULSI for low k dielectric, introduces the research and development status of several low k media with practical value, and finally comments on the prospect of low k dielectric for ULSI