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用溶胶 凝胶技术在Si(10 0 )衬底上制备了单层和渐变型多层的BaxSr(1-x) TiO3 薄膜 ,其膜层组分分别为 :Ba0 .7Sr0 .3TiO3,Ba0 .8Sr0 .2 TiO3,Ba0 .9Sr0 .1TiO3,BaTiO3.对生长制备出的多层BaxSr(1-x) TiO3 薄膜进行了变角度椭偏光谱测量 .通过椭偏光谱解谱分析研究 ,首次得到了BaxSr(1-x) TiO3 多层膜结构不同膜层的膜厚和光学常数 .其结果显示 :椭偏光谱分析得到的不同膜层的膜厚与卢瑟福背向散射测量得到的结果基本相符 ;渐变型多层膜中BaTiO3薄膜的折射率比单层BaTiO3 薄膜折射率大许多 ,与体BaTiO3 的折射率相接近 ,这说明渐变型多层膜中BaTiO3 薄膜的光学性质与体材料的光学性质接近 .
Single and multi-layered BaxSr (1-x) TiO3 thin films were deposited on Si (100) substrates by sol-gel technique. The films were composed of Ba0.7Sr0.3TiO3, Ba0.8Sr0 The results show that BaxSr (1-x) TiO3 thin films grown by the conventional method have been measured by ellipsometric spectroscopic ellipsometry.According to the spectroscopic analysis of the ellipsometric spectra, the BaxSr (1-x) 1-x) film thickness and optical constants of different film structures of TiO 3 multilayers.The results show that the film thickness of different films obtained by ellipsometry basically agrees with the results of Rutherford backscattering measurement; The refractive index of BaTiO3 thin film is much higher than that of single BaTiO3 thin film, which is close to the refractive index of bulk BaTiO3. This shows that the optical properties of BaTiO3 thin films in graded multilayers are close to those of bulk materials.