论文部分内容阅读
一、引言 1967年L.A.Harris采用电子能量分布微分方法,使二次电子能量分布曲线上的俄歇峰同强大的本底和噪声区分开来,从此,俄歇电子谱(AES)成了一种有效的表面分析方法;1969年,因筒镜电子能量分析器应用于俄歇电子谱仪,进一步改善了仪器的分辨率、灵敏度和分析速度。进入七十年代以来,俄歇电子能谱已迅速地发展成为强有力的固体表面分析手段,并正在得到愈来愈广泛的应用。
I. INTRODUCTION In 1967 LA Harris adopted the electron energy distribution differential method to distinguish the Auger peak in the secondary electron energy distribution curve from the strong background and noise. Since then, Auger electron spectroscopy (AES) has become a Effective surface analysis; in 1969, the application of an Auger electron spectrometer to the Auger electron microscope further improved the resolution, sensitivity and speed of analysis. Since entering the seventies, Auger electron spectroscopy has rapidly developed into a powerful solid surface analysis method, and is being more and more widely used.