在光学零件表面镀制特殊要求的不等厚薄膜可使其面形满足特定的函数关系,这对改善光学系统的成象质量具有重要的意义。因此,不等厚薄膜技术颇有实用价值。本文着重介绍使用真空蒸镀工艺获得不等厚薄膜所采用的遮板切口形状的设计方法,作为特例,叙述了航空摄影机光学系统照度补偿板——滤光玻璃不等厚透射膜的制作工艺和测试方法。使用真空蒸镀工艺获得不等厚薄膜,实质上就是有效地控制被镀表面各处所接收的蒸发物质分子的流量。为此,被镀表面与蒸发源之间应置一具有特殊形状切口的遮板,而切口形状与所要求的不等厚薄膜的面形函数相对应。所以,切口形状的设计 Plating special thickness film on the surface of optical parts can make the surface shape meet the specific function, which is of great significance to improve the imaging quality of the optical system. Therefore, unequal thickness thin film technology is quite practical value. This article focuses on the use of vacuum evaporation process to obtain unequal thickness of the film used in the shape of the shutter cut design, as a special case, describes the aerial camera optical system illumination compensation plate - filter glass unequal thickness of the membrane production process and Test Methods. The use of a vacuum evaporation process to obtain an unequal thickness film effectively controls the flow of evaporated material molecules throughout the surface being plated. For this purpose, a mask with a specially shaped cut should be placed between the surface to be plated and the evaporation source, and the shape of the cut corresponds to the profile function of the desired unequal thickness film. So, the shape of the incision design