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色分离光栅(CSG)是一种重要的谐波分离衍射光学元件,它的近场衍射调制可能导致其自身及其后续光学元件的激光诱导损伤。根据色分离光栅的实际制作过程建立了包含对位误差、占空比误差、刻蚀深度误差、塌边误差等多种制作误差的色分离光栅加工误差模型。并基于标量衍射理论,采用傅里叶分析方法,利用该模型推导得到了色分离光栅近场内光强分布公式,并针对惯性约束聚变(ICF)驱动器终端光学系统的色分离光栅进行了计算模拟,得出了近场调制随各种加工制作误差的变化关系。计算结果表明深度误差和塌边误差对光束近场调制有很大影响,对位误差相对影响较小,而相互影响更加严重。该色分离光栅近场分析和计算模拟方法也可用于其他衍射光学元件。
Color separation grating (CSG) is an important harmonic-separation diffractive optical element whose near-field diffraction modulation can cause laser-induced damage to itself and its subsequent optical elements. According to the actual production process of color separation grating, a color separation grating processing error model including alignment error, duty ratio error, etching depth error and falling edge error was established. Based on the scalar diffraction theory, the Fourier analysis method was used to derive the near-field light intensity distribution formula of the color separation grating. The color separation grating of ICF driver terminal optical system was simulated. , Come to the near-field modulation with a variety of manufacturing error changes. The calculation results show that the depth error and the collapse error have a great influence on the beam near-field modulation, the relative error of the bit error is relatively small, and the mutual influence is more serious. The color separation grating near-field analysis and computational simulation methods can also be used for other diffractive optical elements.