用界面电容分析法 ,研究了影响烯烃类分子在氢结尾的硅 (1 1 1 )表面上通过 Si— C键嫁接有机单分子膜的某些因素和有机单分子膜对硅表面氧化的钝化作用 .指出嫁接反应条件或嫁接分子的反应活性的差异都会影响所形成的单分子膜的质量 ;在所选择的反应条件下 ,由于烯烃修饰的硅表面上嫁接分子所占的体积分数约为 0 .90 ,故只能对硅表面的氧化产生有限的钝化作用 .另外 ,系统测量了不同链长的烯烃分子形成的有机单分子膜的电容特性参数 The interfacial capacitance analysis method was used to study some factors which affect the hydrogen-terminated silicon (1 1 1) surface of olefin molecules by grafting organic monomolecular films via Si-C bonds and the passivation of organic monolayers on the surface oxidation of silicon It is pointed out that the difference between the grafting reaction conditions and the reactivity of the grafted molecules affects the quality of the formed monolayer. Under the selected reaction conditions, the volume fraction of the grafted molecules on the surface of the olefin modified silicon is about 0 .90, so it can only have a limited passivation effect on the oxidation of the silicon surface.In addition, the system measured the capacitance characteristics of organic monolayers formed by olefin molecules with different chain lengths