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众所周知,干涉法测长的基本公式为L_o=λ/2(M_i+ε)其中L_o为被测长度,λ为所用干涉光源发射谱线的波长,Mi为整数干涉级,ε为小数干涉级。如果Mi和ε能唯一确定便可得出被测长度的尺寸值。小数干涉级ε可直接由实测得出,关键是整数干涉级Mi能否唯一确定。通常干涉测量所用的谱线都在可见范围,一整数干涉级对应的长度为0.3微米左右。如果只用这样的一条可见谱线来唯一确定Mi,则要求被测长度应
As we all know, the interferometric method for the length of the basic formula L_o = λ / 2 (M_i + ε) where L_o is the measured length, λ is the wavelength of the interfering light source emission line used, Mi is the integer interference level, ε is the fractional interference level. If Mi and ε can be uniquely determined, the size of the measured length can be obtained. The fractional interference level ε can be obtained directly from the measurement. The key point is whether the integer interference level Mi can be uniquely determined. The spectral lines used for interferometric measurements are usually in the visible range, with an integer interference level corresponding to a length of about 0.3 microns. If only one such visible line is used to uniquely identify Mi, then the length of the test should be required