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隨著材料科学、电子学的迅速发展,电子器件日趋微型化和集成化。铁电薄膜由于具有压电、热释电和电光等多种特性,又具有便于集成化和平面化的形式,受到了高度重视。其中,铁电钛酸铅(PbTiO_3)因具有居里温度高,介电常数小,热释电系数大等优点,国外已用溅射法制得的PbTiO_3薄膜作成了非挥发性记忆元件,热释电红外探测器,超声传感器和低阈值的电致发光元件等,显示出其多方面的应用前景。
With the rapid development of materials science and electronics, electronic devices are increasingly miniaturized and integrated. Due to the characteristics of piezoelectric, pyroelectric and electro-optical, ferroelectric thin films have attracted much attention due to their ease of integration and planarization. Among them, lead titanate (PbTiO_3) has many advantages such as high Curie temperature, small dielectric constant and large pyroelectric coefficient. The PbTiO_3 thin films deposited abroad by sputtering have been used as nonvolatile memory devices. Electrical infrared detectors, ultrasonic sensors and low threshold electroluminescent devices, etc., showing its wide range of applications.