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对TiO2／SiO2复合薄膜的晶化特征进行了分析，研究表明，随着TiO2含量的增加，其晶化温度降低，而由锐钛矿相完全转变为金红石相的速度减慢．SiO2的析晶温度也随着TiO2含量的增加而降低，即TiO2具有诱导SiO2析晶的作用．锐钛矿晶粒尺寸的增加幅度随着TiO2含量的降低和热处理温度的升高而增大．其晶粒尺寸的大小与热处理时间的平方根成正比．认为由于TiO2含量的不同，造成薄膜中由锐钛矿相完全转变成金红石相的速度差异主要来自于薄膜中应力的作用．
The crystallization characteristics of TiO2 / SiO2 composite films were analyzed. The results show that the crystallization temperature decreases with the increase of TiO2 content, and the phase transition from anatase phase to rutile phase slows down. The crystallization temperature of SiO2 also decreases with the increase of TiO2 content, that is, TiO2 has the function of inducing SiO2 crystallization. The increase of anatase grain size increases with the decrease of TiO2 content and the heat treatment temperature. The size of the grain size is proportional to the square root of the heat treatment time. It is considered that the difference in the rate of complete transformation of the film from anatase to rutile due to the difference in TiO2 content mainly comes from the stress in the film.